Method of making heat treated coated article with carbon based coating and protective film

ABSTRACT

A method of making a heat treated (HT) or heat treatable coated article. A method of making a coated article includes a step of heat treating a glass substrate coated with at least layer of or including carbon (e.g., diamond-like carbon (DLC)) and an overlying protective film thereon. In certain example embodiments, the protective film may be of or include both (a) an oxygen blocking or barrier layer, and (b) a release layer of or including zinc oxide. Treating the zinc oxide inclusive release layer with plasma including oxygen (e.g., via ion beam treatment) improves thermal stability and/or quality of the product. Following and/or during heat treatment (e.g., thermal tempering, or the like) the protective film may be entirely or partially removed.

Certain embodiments of this invention relate to a method of making aheat treated (HT) or heat treatable coated article to be used in showerdoor applications, window applications, tabletop applications, or anyother suitable applications. For example, certain embodiments of thisinvention relate to a method of making a coated article including a stepof heat treating a glass substrate coated with at least layer of orincluding carbon (e.g., diamond-like carbon (DLC)) and an overlyingprotective film thereon. In certain example embodiments, the protectivefilm may be of or include both (a) an oxygen blocking or barrier layer,and (b) a release layer, with the release layer being located between atleast the carbon based layer and the oxygen blocking layer. The releaselayer may be of or include zinc oxide. Surprisingly, it has been foundthat treating the zinc oxide inclusive release layer with plasmaincluding oxygen (e.g., via ion beam treatment), prior to deposition ofthe oxygen blocking or barrier layer, improves thermal stability and/orquality of the product. Following and/or during heat treatment (e.g.,thermal tempering, or the like) the protective film may be entirely orpartially removed. Other embodiments of this invention relate to thepre-HT coated article, or the post-HT coated article.

BACKGROUND AND SUMMARY OF THE INVENTION

Coated articles such as transparent shower doors and IG window units areoften heat treated (HT), such as being thermally tempered, for safetyand/or strengthening purposes. For example, coated glass substrates foruse in shower door and/or window units are often heat treated at a hightemperature(s) (e.g., at least about 580 degrees C., more typically fromabout 600-650 degrees C.) for purposes of tempering.

Diamond-like carbon (DLC) is sometimes known for its scratch resistantproperties. For example, different types of DLC are discussed in thefollowing U.S. Pat. Nos. 6,303,226; 6,303,225; 6,261,693; 6,338,901;6,312,808; 6,280,834; 6,284,377; 6,335,086; 5,858,477; 5,635,245;5,888,593; 5,135,808; 5,900,342; and 5,470,661, all of which are herebyincorporated herein by reference.

It would sometimes be desirable to provide a window unit or other glassarticle with a protective coating including DLC in order to protect itfrom scratches and the like. Unfortunately, DLC tends to oxidize andburn off at temperatures of from approximately 380 to 400 degrees C., asthe heat treatment is typically conducted in an atmosphere includingoxygen. Thus, it will be appreciated that DLC alone as a protectiveovercoat cannot withstand heat treatments (HT) at the extremely hightemperatures described above which are often required in the manufactureof vehicle windows, IG window units, glass table tops, and/or the like.

Prior art FIG. 1 illustrates a conventional technique which is describedin U.S. Pat. No. 8,071,166, the disclosure of which is herebyincorporated herein by reference. As shown in FIG. 1, prior to thermaltempering, a coated article includes a glass substrate 1, a DLC layer11, a zinc oxide release layer 117 a, and an aluminum nitride (e.g.,AlN) oxygen barrier layer 17 b. Much of the protective overcoat 17thickness consists of a cermet (ZnO—Zn) 117 a, the rest being a densedielectric of AlN 17 b. This coated article on the left side of FIG. 1is then subjected to heat treatment (HT) such as thermal tempering, andthe protective film 17 protects the DLC layer 11 during such heattreatment and prevents the DLC from completely burning off. Followingthe HT, the protective film 17 is removed using a liquid as described inthe '166 patent. Thus, DLC layer 11 is protected with a thermal barrierovercoat film 17 that protects the carbon based layer 11 from completeoxidation during tempering, with the protective film 17 thereafter beingremoved.

It has been found that the cermet (ZnO—Zn; ZnOx) 117 a has a highelectrochemical potential compared to stoichiometric ZnO, and istherefore thermodynamically metastable. The cermet is susceptible tohumidity ingress and acts like a battery during sequences of high andlow humidity/temperature. Over-extended grains of ZnO—Zn cermet arebelieved to create regions of high electrochemical potential which arereadily attacked by water molecules to start an oxidative corrosionprocess of Zn to ZnO. It is believed that these problems, including asignificantly chemically active surface of the layer 117 a, is/arecaused at least in part by the cermet 117 a not being fully oxidizedZnO. Layers 117 a and 17 b have to survive handling and processing priorto and during the thermal tempering process. To address these deficiencycaused by the (ZnO—Zn; ZnOx) 117 a, it has been attempted to furtherprotect the protective film 17 with an overlying thin polymer basedflexible Temporary Protective Film (TPF), not shown in FIG. 1, that canbe later peeled off.

It has been found that the stoichiometry of the ZnO_(x) is not adielectric, as it displays semiconducting behavior and has apolycrystalline Wurtzite structure with metallic and substoichiometricZnOx. This material is not hard, is susceptible to water ingress, andcan be scratched off easy. In order to avoid or reduce handlingscratches, which would degrade the thermal protection of DLC duringtempering and therefore burn the DLC, the TPF (e.g., of polyethylene forexample) coated with a pressure sensitive adhesive on one side isapplied over the AlN. This TPF is not available for float glass having awidth of 3.21 m. Thus, when manufacturing products having a large widthsuch as 3.21 m, two smaller TPF films are overlapped in order to coverthe large width, and the overlap tends to occur in an area of theproduct where the glass is coated with DLC (e.g., in an approximatelycentral area of the product). For example, TPF (e.g., Nitto TPF A7) froma big TPF roll of 2.56 m (100 inch) and from a small roll of 66 cm widthcan be used, with the TPF from the respective rolls overlapping on theproduct prior to HT.

This overlap of adjacent TPF films at the seam creates a capillary. Inan attempt to avoid water penetrating into this capillary, it has beenattempted to close the slit with UV-curable gel for example. However,this gel reacts with the reactive cermet (ZnO—Zn; ZnOx) in front of thetempering process, in a reaction which is promoted by water. This thenyields a line of degraded DLC indicated by haze in reflection and/orburn marks where the overlap occurred. These haze and/or burn marks,which occur in the DLC following HT in areas where the overlap occurred,are detrimental and not desired by customers.

In certain example embodiments of this invention, prior to the heattreatment (HT) and prior to the deposition of the AlN inclusive layer ofthe protective film, there is presented a technique for transforming thecermet ZnOx to a more stable ZnO_(x) via plasma passivation treatment.For example, the ZnO, based layer can be treated with a plasma of orincluding oxygen plasma, from an ion beam source(s). The ion beamtreatment may be from an ion source(s) in collimated mode in certainexample embodiments. Alternatively, the ion beam treatment may be froman ion source in a diffuse mode. After the ion beam treatment of theZnO_(x), the barrier layer (e.g., AlN layer) is then deposited over theion beam treated ZnO_(x). Surprisingly, it has been found that treatingthe zinc oxide inclusive release layer with plasma including oxygen(e.g., via ion beam treatment), prior to deposition of the oxygenblocking or barrier layer, improves thermal stability and/or quality ofthe product. For example, it has been found that the ion beam treatmentof the layer comprising ZnO_(x) reduces the concentration of OH-groupson the layer's surface and reduces the layer's surface roughness,thereby improving the layer's thermal stability and reducing thelikelihood of the undesirable burning. Following and/or during heattreatment (e.g., thermal tempering, or the like) the protective film maybe entirely or partially removed.

Example advantages include one or more of: (i) reduced or elimination ofburn marks where the TPF overlap occurred; (ii) improved thermal and/orhumidity stability of the protective film; and (iii) easy removal of theprotective film after thermal tempering.

In certain example embodiments of this invention, there is provided amethod of making a coated article, the method comprising: depositing arelease layer comprising zinc oxide on a glass substrate, wherein atleast a layer comprising carbon is located between the glass substrateand the release layer comprising zinc oxide; ion beam treating the layercomprising zinc oxide with at least oxygen ions to provide an ion beamtreated layer comprising zinc oxide; depositing an oxygen barrier layeron the glass substrate over the ion beam treated layer comprising zincoxide; and wherein a protective film comprising the ion beam treatedlayer comprising zinc oxide and the oxygen barrier layer are forprotecting the layer comprising carbon during subsequent heat treatmentin order to prevent significant burnoff of the layer comprising carbon.

In certain example embodiments, there is provided a method of making aheat treated coated article, the method comprising: heat treating acoated glass substrate, the coated glass substrate comprising, prior tothe heat treating, a glass substrate, a layer comprising diamond-likecarbon (DLC) on the glass substrate, and a protective film on the glasssubstrate over at least the layer comprising DLC, wherein the protectivefilm includes (i) a release layer comprising zinc oxide which has beenion beam treated with at least oxygen ions, and (ii) and an oxygenbarrier layer, the release layer and the oxygen barrier layer being ofdifferent material; during said heat treating of the coated glasssubstrate with the layer comprising DLC and the protective film thereon,the protective film prevents significant burnoff of the layer comprisingDLC, and wherein the heat treating comprises heating the glass substrateto temperature(s) sufficient for thermal tempering, heat strengthening,and/or heat bending; and exposing the protective film to a releaseliquid and removing at least part of the protective film during and/orafter said heat treating.

In certain example embodiments of this invention, there is provided acoated article comprising: a glass substrate supporting a coating, thecoating comprising moving away from the glass substrate: a layercomprising diamond-like carbon (DLC); a layer comprising zinc oxide(e.g., which may be ion beam treated), wherein a concentration ofOH-groups at a surface of the layer comprising zinc oxide farthest fromthe glass substrate is no greater than about 40%; and a layer comprisingaluminum nitride on the glass substrate over and directly contacting thelayer comprising zinc oxide.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross sectional view of a coated article, prior toand following heat treatment, according to a conventional technique.

FIG. 2 is a schematic cross sectional view of a coated article, prior toand following heat treatment, according to an example embodiment of thisinvention.

FIG. 3 is a schematic cross sectional view of a coated article, prior toand following heat treatment, according to another example embodiment ofthis invention.

FIGS. 4( a) and 4(b) are Atomic Force Microscopy (AFM) and position (μm)vs. height (nm) graphs with horizontal line scan illustrating thesurface of a ZnO layer without (FIG. 4( a)) and with (FIG. 4( b)) oxygenion beam treatment.

FIGS. 5( a) and 5(b) are XPS photoelectron spectroscopy graphsillustrating the chemical environment of the Zn atoms with (FIG. 5( a))and without (FIG. 5( b)) oxygen ion beam treatment based on the O1ssignals measured on the ZnO, layer.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS OF THE INVENTION

Referring now more particularly to the accompanying drawings in whichlike reference numerals indicate like parts throughout the severalviews.

Prior to thermal tempering, a coated article includes at least a glasssubstrate 1, a carbon based layer 11 of or including a material such asDLC, a release layer 17 a, 17 a′ of or including zinc oxide ZnO_(x), anoxygen barrier layer 17 b of or including a material such as aluminumnitride (e.g., AlN), and optionally a protective overcoat 17 c of amaterial such as TPF (which may be peeled off when desired) or siliconnitride. As the zinc oxide layer 17 a is sputter-deposited on (directlyor indirectly) the glass substrate 1, it is of or includes a cermet(ZnO—Zn). After the oxygen barrier layer 17 b is deposited over the zincoxide layer, and optionally after an additional TPF overcoat 17 c hasbeen applied and peeled off, the coated article including glasssubstrate and layers 11, 17 a′ and 17 b is subjected to heat treatment(HT) such as thermal tempering, and the protective film 17 protects thecarbon based layer 11 during such heat treatment and prevents the carbonbased layer (e.g., DLC) from completely burning off. Following the HT,the protective film 17 is removed using a liquid, as the release layer17 a′ is easily susceptible to removal using a liquid such as vinegarand/or water. Thus, DLC layer 11 is protected with a thermal barrierovercoat film 17 that protects the carbon based layer 11 from completeoxidation during tempering, with the protective film 17 thereafter beingremoved.

In certain example embodiments of this invention, prior to the heattreatment (HT) and prior to the deposition of the AlN inclusive layer 17b of the protective film 17, there is presented a technique fortransforming the cermet ZnOx 17 a to a more stable ZnO_(x) 17 a′ viaplasma passivation treatment. For example, the sputter deposited ZnO_(x)based layer 17 a is treated with a plasma of or including oxygen plasma,e.g., from an ion beam source(s) 30. The ion beam 31 treatment may befrom an ion source(s) 30 in collimated mode, or other suitable mode, incertain example embodiments. After the ion beam treatment of theZnO_(x), a barrier layer (e.g., AlN layer) 17 b is then deposited overthe ion beam treated ZnO_(x) 17 a′. Surprisingly, it has been found thattreating the zinc oxide inclusive release layer 17 a with plasmaincluding oxygen (e.g., via ion beam treatment), prior to deposition ofthe oxygen blocking or barrier layer 17 b, improves thermal stabilityand/or quality of the product. For example, it has been found that theion beam treatment of the layer comprising ZnO_(x) 17 a reduces theconcentration of OH-groups on the layer's surface and reduces thelayer's surface roughness, thereby improving the layer's thermalstability and reducing the likelihood of the undesirable burning.Example advantages include one or more of: (i) reduced or elimination ofburn marks where the optional TPF overlap occurred; (ii) improvedthermal and/or humidity stability of the protective film 17; and (iii)easy removal of the protective film 17 after thermal tempering.

In certain instances, the HT may involve heating a supporting glasssubstrate 1, with the carbon (e.g., DLC) 11 thereon and the layers 17 a′and 17 b thereon, to temperature(s) of from 550 to 800 degrees C., morepreferably from 580 to 800 degrees C. (which is well above the burn-offtemperature of DLC). The sacrificial protective film 17 allows the DLC11 to withstand such HT without significantly burning off and/or withoutsignificantly oxidizing during the same. Sacrificial protective film 17is formed on the glass substrate 1 over the DLC 11 to reduce thelikelihood of the DLC burning off during HT. Thus, the majority (if notall) of the DLC 11 remains on the glass substrate 1, and does not burnoff, during the HT. Following HT, the sacrificial protective film 17(which may include two or more layers) may or may not be removed indifferent embodiments of this invention.

In certain example embodiments, the sacrificial protective film 17 maybe of or include both (a) an oxygen blocking or barrier layer 17 b, and(b) a release layer. The release layer is sputter-deposited as 17 a, andis then subjected to ion beam treatment to transform it into 17 a′. Anexample advantage of using distinct and different oxygen-blocking andrelease layers in film 17 is that each layer (17 a and 17 b) can beoptimized for its intended function. Consequently, the optimizedperformance of the sacrificial film 17 may be improved and it can bemade thinner if desired. In certain example embodiments, following HTand removal of the film 17, the DLC inclusive layer 11 protects theglass substrate 1 against abrasion and corrosion, and against adhesionof minerals in hard water (e.g., has good hard water cleanability).

FIG. 2 is a schematic cross sectional view of a coated article, beforeand after heat treatment, according to an example embodiment of thisinvention. The coated article shown at the far left of FIG. 2 includesglass substrate 1, DLC inclusive layer 11, and sputter deposited releaselayer 17 a of or including ZnO_(x). As sputter-deposited, ZnO_(x) layer17 a has a chemically active outer surface believed to be caused atleast in part by the cermet (ZnO—Zn; ZnOx) not being fully oxidized ZnO.In certain example embodiments, the ZnO_(x) layer 17 a may be doped withsmall amounts of aluminum and/or nitrogen. Glass substrate 1 istypically of or includes soda-lime-silica glass, although other types ofglass may be used in certain instances.

DLC inclusive layer 11 may be from about 5 to 1,000 angstroms (Å) thickin certain example embodiments of this invention, more preferably from10-300 Å thick, and most preferably from 20 to 65 Å thick, possibly fromabout 25-50 Å thick, with an example thickness being about 30 angstroms.In certain example embodiments of this invention, DLC layer 11 may havean average hardness of at least about 10 GPa, more preferably at leastabout 20 GPa, and most preferably from about 20-90 GPa. Such hardnessrenders layer(s) 11 resistant to scratching, certain solvents, and/orthe like. Layer 11 may, in certain example embodiments, be of or includea special type of DLC known as highly tetrahedral amorphous carbon(t-aC), and may be hydrogenated (t-aC:H) in certain embodiments. Incertain hydrogenated embodiments, the t-aC type or any other suitabletype of DLC may include from 1 to 30% hydrogen, more preferably from5-20% H, and most preferably from 10-20% H. This t-aC type of DLCincludes more sp³ carbon—carbon (C—C) bonds than sp² carbon—carbon (C—C)bonds. In certain example embodiments, at least about 30% or 50% of thecarbon-carbon bonds in DLC layer 11 may be sp³ carbon—carbon (C—C)bonds, more preferably at least about 60% of the carbon-carbon bonds inthe layer 11 may be sp³ carbon—carbon (C—C) bonds, and most preferablyat least about 70% of the carbon-carbon bonds in the layer 11 may be sp³carbon—carbon (C—C) bonds. In certain example embodiments of thisinvention, the DLC may have an average density of at least about 2.4gm/cm³, more preferably at least about 2.7 gm/cm³. Example linear ionbeam sources that may be used to deposit DLC inclusive layer 11 onsubstrate 1 include any of those in any of U.S. Pat. Nos. 6,261,693,6,002,208, 6,335,086, or 6,303,225 (all incorporated herein byreference). When using an ion beam source to deposit layer(s) 11,hydrocarbon feedstock gas(es) (e.g., C₂H₂), HMDSO, or any other suitablegas, may be used in the ion beam source in order to cause the source toemit an ion beam toward substrate 1 for forming layer(s) 11. It is notedthat the hardness and/or density of layer(s) 11 may be adjusted byvarying the ion energy of the depositing apparatus. DLC layer 11 allowsthe coated article to be easier to clean from hard water and be morescratch resistant than if the DLC 11 were not provided. It is noted thatwhile layer 11 is on glass substrate 1 in certain embodiments of thisinvention, additional layer(s) may or may not be under layer 11 betweenthe substrate 1 and layer 11 in certain example embodiments of thisinvention. Thus, the phrase “on” as used herein is not limited to beingin direct contact with the substrate as other layer(s) may still beprovided therebetween. Thus, “on” and “support” as used herein mean bothdirectly on and indirectly on with other layer(s) therebetween.

For example and without limitation, the layer 11 of or including DLC maybe any of the DLC inclusive layers of any of U.S. Pat. Nos. 6,592,993;6,592,992; 6,531,182; 6,461,731; 6,447,891; 6,303,226; 6,303,225;6,261,693; 6,338,901; 6,312,808; 6,280,834; 6,284,377; 6,335,086;5,858,477; 5,635,245; 5,888,593; 5,135,808; 5,900,342; or 5,470,661 (allof these patents hereby being incorporated herein by reference), oralternatively may be any other suitable type of DLC inclusive layer. TheDLC 11 may or may not include from about 5-30% Si, more preferably fromabout 5-25% Si, and possibly from about 10-20% Si in certain exampleembodiments of this invention. Hydrogen may also be provided in the DLCin certain instances.

Sacrificial protective film 17 is provided in order to protect DLC layer11 during HT. If film 17 were not provided, the DLC 11 wouldsignificantly oxidize during HT and burn off, thereby rendering thefinal product defenseless against scratching. However, the presence ofsacrificial protective film 17 prevents or reduces the amount of oxygenwhich can reach the DLC 11 during HT from the surrounding atmosphere,thereby preventing the DLC from significantly oxidizing during HT. As aresult, after HT, the DLC inclusive layer 11 remains on the glasssubstrate 1 in order to be easier to clean from hard water and providescratch resistance and/or the like. In certain example embodiments, theprotective film 17 includes both an oxygen blocking or barrier layer 17b, and an underlying release layer 17 a′. The release layer 17 a, 17 a′may be in directly contact with the DLC layer 11 in certain exampleembodiments, e.g., as shown in FIG. 2.

As shown at the far left of FIG. 2, after ZnO_(x) layer 17 a issputter-deposited on the glass substrate 1, at least one ion source 30is used to ion beam treat the ZnO_(x) layer 17 a with at least oxygenions in order to transform the cermet ZnOx 17 a to a more stable ZnO, 17a′ via this plasma passivation treatment. The ion beam 31 treatment maybe from an ion source(s) 30 in collimated mode, or other suitable mode,in certain example embodiments. The ion beam 31 treatment of the ZnO_(x)17 a, which further oxidizes layer 17, is preferably performed directlyafter the ZnO_(x) 17 a has been sputter-deposited (before any otherlayer has been sputter-deposited thereover), in a neighboringcompartment/chamber of a deposition apparatus, with or without apumping-out section being provided between the vacuum sputteringchamber(s) where the ZnO_(x) 17 a is deposited and the vacuum chamberwhere the ion beam source(s) 30 is located for treating the zinc oxidewith an ion beam(s) 31. In example embodiments, pure or substantiallypure oxygen gas is introduced into the ion source 30 for generating theion beam 31 that is used to ion beam treat the zinc oxide based releaselayer. For example, the gas introduced into the ion source 30 forgenerating the ion beam 31 may be O₂, and may be free of orsubstantially free of carbon. For instance, the gas introduced into theion source may have from 0-15% carbon, more preferably from 0-10% or0-5% carbon (atomic %), so that little or no carbon ions are implantedinto the layer 17 a, 17 a′ via the ion beam from the source 30. However,it is possible for other gas(es) (e.g., argon and/or nitrogen) to bepresent in the vacuum chamber where the ion beam treatment occurs sothat amounts of such materials (e.g., Ar and/or N) end up beingintroduced into the release layer in the ion beam treatment chamber. Theion beam treatment may be of the “peening” type which is performed afterthe layer 17 a has been sputter deposited, or of the ion beam assisteddeposition (IBAD) type which is performed during the deposition of thezinc oxide based release layer. In certain example embodiments. Arelatively high anode-cathode voltage is utilized in the ion source(s)30 in example embodiments of this invention for the ion beam treatmentof the zinc oxide release layer, preferably at least about 1,000 V, morepreferably at least about 1,500 V, and sometimes at least about 3,000 V.Too low of a voltage results in the bum marks in areas of TPF overlapnot disappearing. A preferred voltage is from about 1,500-5,000V, morepreferably from 1,500-3.500 V, with examples being 1,500 V and 3,000 V.

FIGS. 4( a) and 4(b) are Atomic Force Microscopy (AFM) and position (μm)vs. height (nm) graphs with horizontal line scan illustrating thesurface of a ZnO_(x) layer without (FIG. 4( a)—layer 17 a) and with(FIG. 4( b)—ion beam treated layer 17 a′) oxygen ion beam treatment.Thus, differences of the ZnO surface have been analysed with AFM. FIG. 4shows a 3D reconstruction of topographic image and a corresponding linescan, with and without the ion beam treatment. As shown in FIGS. 4(a)-(b), the surface roughness parameters Sy, St and Si of the zinc oxidelayer can be reduced by a linear ion beam treatment with oxygen ionsusing 1500 V from about 200 nm for non-treated (FIG. 4( a)) to about 105nm for the ion beam treated ZnO layer 17 a′. Thus, in certain exampleembodiments of this invention, the ion beam treatment 31 of the zincoxide layer causes the average surface roughness of the zinc oxiderelease layer to reduce by at least about 20 nm, more preferably by atleast about 50 nm, and most preferably by at least about 75 nm.

FIGS. 5( a) and 5(b) are XPS photoelectron spectroscopy graphsillustrating the chemical environment of the Zn atoms with (FIG. 5(a)—ion beam treated layer 17 a′) and without (FIG. 5( b)—nontreatedlayer 17 a) oxygen ion beam treatment based on the O1s signals measuredon the ZnO_(x) layer. The impact of ion beam treatment, with oxygen ionsin the ion beam 31 from the source 30, on the chemical composition ofthe ZnO surface can be seen especially on the O1s peak in thecorresponding XPS spectra in FIGS. 5( a)-(b). It can be seen in FIGS. 5(a)-(b) that the ion beam treatment process using oxygen ions at 1500 Vreduced the concentration of OH-groups on the outer surface of the ZnOlayer from 45% to 32%. The outermost surface (the surface farthest fromthe glass substrate) of the ion beam treated zinc oxide layer willcontain less OH-groups, because the information depth of XPS is about 5nm. Therefore, the ion beam treatment of the zinc oxide based releaselayer renders the zinc oxide release layer less chemically reactive andprovides for improved thermal stability and the reduction/elimination ofoverlap burning following HT. In certain example embodiments of thisinvention, the ion beam treatment 31 of the zinc oxide layer causes theconcentration of OH-groups at the layer's outer surface to drop by atleast 5%, more preferably by at least 10%. In certain exampleembodiments of this invention, after the ion beam treatment and/or afterlayer 17 b has been deposited, the concentration of OH-groups at thesurface of zinc oxide based layer 17 a′ farthest from the glasssubstrate is no greater than about 40%, more preferably no greater thanabout 35%, and most preferably no greater than about 33% (atomic % aswith other percentages herein).

Accordingly, it can be seen that the ion beam treatment of the zincoxide based release layer, e.g., in collimated mode using oxygen ions,passivates the surface of the zinc oxide based release layer. Forexample, macro particles on the surface of the layer will be passivatedand no longer dominate the behavior of the product in terms of chemicaldurability. The ion beam treatment reduces the surface roughness of thezinc oxide based release layer, as well as the amount of OH groups,thereby improving thermal stability of the product especially in theoverlap region where adjacent TPL films may have overlapped. Thus,surprisingly, it has been found that treating the zinc oxide inclusiverelease layer 17 a with plasma including oxygen (e.g., via ion beamtreatment), prior to deposition of the oxygen blocking or barrier layer17 b, improves thermal stability and/or quality of the product. Ion beamtreatment of the layer comprising ZnO_(x) 17 a reduces the concentrationof OH-groups on the layer's surface and reduces the layer's surfaceroughness, thereby improving the layer's thermal stability and reducingthe likelihood of the undesirable burning.

After the ion beam treatment of the ZnO_(x) at the far left of FIG. 2, abarrier layer (e.g., AlN layer) 17 b is then deposited (e.g., sputterdeposited) on the substrate 11 over the ion beam treated ZnO, 17 a′ inthe center section of FIG. 2. Thus, the ion beam treated zinc oxidebased release layer 17 a′ with reduced chemical reactivity is thereaftercovered by a barrier layer 17 b of or including a material such as AlN.An optional TPF film(s) 17 c may then be formed on the substrate 1 overthe layers 17 a′, 17 b in certain example embodiments.

Thus, in the FIG. 2 example embodiment of this invention, the protectivefilm 17 includes a first zinc oxide inclusive layer 17 a, 17 a′ which isthe release layer, and aluminum nitride inclusive layer 17 b which is anoxygen barrier layer. An oxygen “blocking” or “barrier” layer means thatthe layer blocks significant amounts of oxygen from reaching the DLCduring HT. The different compositions of layers 17 a′ and 17 b causedifferent stresses in layers 17 a′ and 17 b, which stresses aremanipulated so as to allow the film 17 to be more easily removed duringand/or following HT. Layer 17 a, 17 a′ of or including zinc oxide (whichmay or may not be doped with from about 1-12% Al, more preferably fromabout 1-6% Al, and/or possibly doped with nitrogen) may be considered arelease layer for allowing the film 17 to be easily removed from the DLCor substrate during and/or after HT, whereas the more dense layer 17 bof or including a material such as aluminum nitride may be considered anoxygen blocking or barrier layer that reduces or prevents the DLC 11from burning off and/or oxidizing during HT. Note also that anygettering layer may be considered an oxygen barrier layer in certainexample instances. The more dense layer 17 b also may be considered ablocking/protection layer for protecting the softer release layer 17 a′during heat treatment, storage, and otherwise. Zinc oxide is a highlyadvantageous material for use in release layer 17 a, 17 a′ because itcan be easily removed (e.g., using water and/or vinegar) during and/orfollowing HT in a non-toxic manner. In certain example embodiments, therelease layer is a dielectric or semiconductor layer. One or both oflayers 17 a, 17 b may be sputter-deposited on substrate 1 over thecarbon based layer 11 in certain example embodiments of this invention.Note that one or both of layers 17 a and 17 b may be doped with othermaterials such as Zr, Ni, Fe, Cr, Ti, Mg, mixtures thereof, or the like,in certain example embodiments of this invention.

In certain example embodiments of this invention, release layer 17 a maybe deposited (e.g., via sputtering) so as to be from about 50-20,000 Åthick, more preferably from about 50-3,000 Å thick, even more preferablyfrom about 100-2,000 Å thick, with an example thickness being from about1,000-2,000 Å (e.g., about 1600 angstroms thick). In certainembodiments, aluminum nitride inclusive barrier layer 17 b may bedeposited (e.g., via sputtering) so as to be from about 200-10,000 Åthick, more preferably from about 300-5,000 Å thick, more preferablyfrom about 400-800 Å thick, with an example thickness being about 600 Å.Release layer 17 a, 17 a′ may be thicker than barrier layer 17 b incertain example embodiments of this invention; e.g., layer 17 a, 17 a′may be at least 25% thicker than layer 17 b in certain example instancesprior to HT. A preferred thickness of overall sacrificial film 17 incertain example embodiments is less than about 10,000 Å, more preferablyless than about 3,000 Å, and most preferably less than about 2,500 Å.

The coated article in the center section of FIG. 2 (except that the TPF17 e may have been removed) is then subjected to HT such as thermaltempering, and the protective film 17 made up of 17 a′ and 17 b protectsthe DLC 11 from burning off during the HT as discussed herein. Theprotective film 17 may then be removed by application of a liquid suchas vinegar and/or water, and brushing/wiping, to arrive at the coatedarticle at the right part of FIG. 2.

FIG. 3 is applicable to any of the embodiments discussed herein. TheFIG. 3 embodiment is the same as the FIG. 2 embodiment, except foradditional dielectric layer 6 of or including a material such as siliconnitride and/or silicon oxide that is located between the carbon basedlayer 11 and the glass substrate 1. After heat treatment or HT (e.g.,tempering), the product is exposed to a mildly reactive liquid (e.g.,water, vinegar, dilute ammonia and/or bleach) as in other embodimentsherein, and the liquid penetrates through to the release layer 17 a′ viapinholes or grain boundaries in the overlying layer(s) and causes therelease layer to disband from the DLC 11. Thus, the release layer 17 a′,the oxygen barrier layer 17 b, and the protective layer 17 c can beremoved. Vinegar is a particularly good release liquid for use with thematerials shown, although other liquid(s) such as water may also orinstead be used for removal of sacrificial film 17. As with otherembodiments herein, brushing (e.g., via rotating brushes such as nylonbrushes or the like) may be used to remove film 17 when wetted withwater, vinegar, or the like in certain example instances. Examplethickness for layer 6 are as follows in this example embodiment: barrierlayer 6 of or including silicon nitride from about 100-300 Å thick(e.g., about 200 Å thick). It is also noted that the TPF 17 c can beprovided as layer 17 c during storage and/or shipment, and can be peeledoff before, during, or after HT. Such a protective TPF layer(s) 17 cover the barrier layer 17 b may be used in any embodiment herein.

In certain embodiments of this invention, other materials may be used.For example, oxygen blocking/barrier layer 17 b need not be of aluminumnitride. A barrier layer 6 (discussed above in FIG. 3) may or may not beprovided between the glass and the DLC. The oxygen blocking/barrierlayer 17 b may be of or include a material selected from the groupconsisting of: zinc oxide, silicon carbide, aluminum nitride, boronoxide, aluminum oxide, aluminum oxynitride, silicon nitride, siliconoxide, silicon oxynitride, and mixtures thereof. Preferred materials forthe oxygen blocking or barrier layer 17 b are aluminum nitride, aluminumoxynitride, and silicon carbide in certain example embodiments. Incertain example embodiments, the layer 17 b is designed to he at leastas hard and/or durable as glass. Release layer 17 a may be of material(e.g., zinc oxide, zinc oxynitride or zinc aluminum oxynitride, each ofwhich may be doped with Al) that dissolves or readily reacts with water,vinegar, and/or bleach. Release layer 17 a preferably has a meltingpoint (or dissociation temperature) above 580 or 600 degrees C. incertain example embodiments. Note that the term “oxide” as used hereinis broad enough to encompass suboxides. Release layer 17 a, 17 a) istypically more dissolvable than is layer 17 b in water, vinegar, bleachand/or the like. Moreover, in certain example embodiments, oxygenbarrier layer 17 b is more of a barrier to oxygen and/or is harder thanis release layer 17 a, 17 a′. Exemplary coatings may produce highquality post-HT and post-release DLC, with good hard water cleanabilityand good scratch resistance. The release layer 17 a and/or the oxygenbarrier layer 17 b may be deposited via sputtering, or any othersuitable technique, in different example embodiments of this invention.

An example process of manufacturing a coated article will now bedescribed, with reference to FIGS. 2-3. Initially, glass substrate 1 isprovided, and at least one barrier layer 6 (e.g., silicon oxide, siliconnitride, silicon oxynitride, or the like) may optionally be sputtered ona surface thereof. Optionally, a multi-layer solar control coating (notshown) may be deposited (e.g., via sputtering) on the surface of theglass substrate 1 opposite the barrier layer 6. At least one layer 11 ofor including DLC is deposited (e.g., via ion beam deposition) on theglass substrate 1, over at least the optional barrier layer 6 ifpresent. Then, protective film 17, e.g., including layers 17 a and 17 b,is deposited on the substrate 1 over the DLC inclusive layer 11. Afterzinc oxide based layer 17 a has been deposited, but before layer 17 bhas been deposited, the zinc oxide based release layer is ion beamtreated as discussed above. Protective film 17 may be deposited viasputtering, CVD, ion beam deposition, or any other suitable technique.Optionally, a thin protective layer(s) comprising TPF, DLC, siliconnitride, or silicon aluminum nitride (not shown), may be provided oversacrificial film 17 prior to HT, for durability and/or oxygen barrierpurposes. As shown in FIGS. 2-3, the glass substrate 1 with films 6(optional), 11 and 17 thereon is then heat treated (HT) for purposes ofthermal tempering, heat bending, heat strengthening, and/or the like. Atleast part of this HT may be conducted, for example, in an atmosphereincluding oxygen as known in the art at temperature(s) of from 550 to800 degrees C., more preferably from 580 to 800 degrees C. (i.e.,temperature(s) above the burn-off temperature of DLC). The FIT may lastfor at least one minute, more preferably from 1-10 minutes, in certainexample non-limiting embodiments of this invention. During HT, thepresence of protective film 17 protects DLC inclusive layer 11 from theHT and prevents layer 11 from significantly oxidizing and/or burning offdue to significant oxidation during the HT. While in some instances someof layer 11 may burn off during FIT, the majority if not all of DLCinclusive layer 11 remains on the substrate 1 even after the HT due tothe presence of protective film 17. A significant advantage associatedwith using zinc oxide in the release layer 17 a, 17 a′ is its ease ofremoval after HT. Sole layers of silicon nitride for example requirecomplex etching in order to remove the same after HT. On the other hand,it has been found that when release layer 17 a, 17 a′ is of or includeszinc oxide, the application of vinegar and/or water allows portions offilm 17 remaining after HT to be easily removed (e.g., along withrubbing/brushing) in a non-toxic manner. In certain example instances,rubbing with such liquids may be especially beneficial in removing film17 after HT when the coated article is still warm therefrom (e.g., whenthe film 17 is from about 80-200 degrees C., more preferably from about100-180 degrees C.; although the removal of film 17 may also take placeat room temperature in certain example embodiments). After film 17 hasbeen removed, the remaining coated article is shown at the right side ofFIGS. 2-3, and includes an outer layer comprising scratch resistant DLC11. The aforesaid example processes are advantageous in that theyprovide a technique for allowing a coated article including a protectiveDLC inclusive layer 11 to be heat treated without the DLC layer 11burning off or significantly oxidizing during such HT. In other words,it becomes possible to provide a protective DLC or other carbon basedlayer 11 on a heat treated (e.g., thermally tempered) product in acommercially acceptable manner. According to certain example embodimentsof this invention, monolithic coated articles herein preferably have avisible transmission after HT of at least about 40%, more preferably ofat least about 50 or 60%.

In certain example embodiments of this invention, there is provided amethod of making a coated article, the method comprising: depositing arelease layer comprising zinc oxide on a glass substrate, wherein atleast a layer comprising carbon is located between the glass substrateand the release layer comprising zinc oxide; ion beam treating the layercomprising zinc oxide with at least oxygen ions to provide an ion beamtreated layer comprising zinc oxide; depositing an oxygen barrier layeron the glass substrate over the ion beam treated layer comprising zincoxide; and wherein a protective film comprising the ion beam treatedlayer comprising zinc oxide and the oxygen barrier layer are forprotecting the layer comprising carbon during subsequent heat treatmentin order to prevent significant burnoff of the layer comprising carbon.

In the method of the immediately preceding paragraph, said ion beamtreating may comprise directing an ion beam including oxygen ions towardthe release layer comprising zinc oxide, wherein the ion beam issubstantially free of carbon ions.

In the method of any of the preceding two paragraphs, said ion beamtreating may comprise directing an ion beam consisting essentially ofoxygen ions toward the release layer comprising zinc oxide.

In the method of any of the preceding three paragraphs, the releaselayer may consists essentially of zinc oxide, which may optionally bedoped with aluminum and/or nitrogen.

In the method of any of the preceding four paragraphs, said ion beamtreating of the layer comprising zinc oxide may cause a concentration ofOH-groups at an outer surface of the layer comprising zinc oxide to dropby at least 5%, more preferably by at least 10%.

In the method of any of the preceding five paragraphs, the oxygenbarrier layer may comprise or consist essentially of aluminum nitride.

In the method of any of the preceding six paragraphs, the oxygen barrierlayer may directly contact the ion beam treated layer comprising zincoxide.

In the method of any of the preceding seven paragraphs, the layercomprising carbon may comprise diamond-like carbon (DLC).

The method of any of the preceding eight paragraphs may further compriseheat treating the glass substrate with at least following layersthereon: the layer comprising carbon, the ion beam treated layercomprising zinc oxide, and the oxygen barrier layer; and wherein saidheat treating may comprise heating the glass substrate to temperature(s)sufficient for thermal tempering, heat strengthening, and/or heatbending of the glass substrate. The heat treating may comprise heatingthe glass substrate at temperature(s) of at least 550 degrees C., morepreferably at least 580 degrees C.

The method of any of the preceding nine paragraphs may further compriseexposing the protective film to a release liquid and removing at leastpart of the protective film during and/or after heat treatment.

The method of any of the preceding ten paragraphs may further compriseadhering first and second overlapping polymer based layers (e.g., TPFlayers) to an upper surface of the oxygen barrier layer.

The method of any of the preceding eleven paragraphs may furthercomprise sputter-depositing a layer comprising silicon nitride on theglass substrate, wherein the layer comprising silicon nitride may belocated between the glass substrate and the layer comprising carbon.

In the method of any of the preceding twelve paragraphs, at least priorto heat treatment the ion beam treated layer comprising zinc oxide maybe located between and directly contacting the layer comprising carbonand the oxygen barrier layer.

In the method of any of the preceding thirteen paragraphs, the layercomprising carbon may comprise amorphous DLC and have more sp³carbon-carbon bonds than sp² carbon-carbon bonds. The DLC may behydrogenated.

In the method of any of the preceding fourteen paragraphs, the coatedarticle may be substantially transparent at least following heattreatment and removal of the protective film.

In the method of any of the preceding fifteen paragraphs, after removingthe oxygen barrier layer and the ion beam treated layer comprising zincoxide, the layer comprising carbon may be exposed so as to be anoutermost layer of the coated article.

In certain example embodiments, there is provided a method of making aheat treated coated article, the method comprising: heat treating acoated glass substrate, the coated glass substrate comprising, prior tothe heat treating, a glass substrate, a layer comprising diamond-likecarbon (DLC) on the glass substrate, and a protective film on the glasssubstrate over at least the layer comprising DLC, wherein the protectivefilm includes (i) a release layer comprising zinc oxide which has beenion beam treated with at least oxygen ions, and (ii) and an oxygenbarrier layer, the release layer and the oxygen barrier layer being ofdifferent material; during said heat treating of the coated glasssubstrate with the layer comprising DLC and the protective film thereon,the protective film prevents significant burnoff of the layer comprisingDLC, and wherein the heat treating comprises heating the glass substrateto temperature(s) sufficient for thermal tempering, heat strengthening,and/or heat bending; and exposing the protective film to a releaseliquid and removing at least part of the protective film during and/orafter said heat treating.

In the method of the immediately preceding paragraph, the oxygen barrierlayer may comprise or consist essentially of aluminum nitride.

In the method of any of the preceding two paragraphs, the oxygen barrierlayer may directly contact the ion beam treated layer comprising zincoxide.

The method of any of the preceding three paragraphs may further compriseadhering first and second overlapping polymer based layers to an uppersurface of the oxygen barrier layer.

In the method of any of the preceding four paragraphs, the layercomprising carbon may comprise amorphous DLC and have more sp³carbon-carbon bonds than sp² carbon-carbon bonds. The DLC may behydrogenated.

In the method of any of the preceding five paragraphs, after removingthe oxygen barrier layer and the ion beam treated layer comprising zincoxide, the layer comprising DLC may be exposed so as to be an outermostlayer of the coated article.

While the invention has been described in connection with what ispresently considered to be the most practical and preferred embodiments,it is to be understood that the invention is not to be limited to thedisclosed embodiments, but on the contrary, is intended to cover variousmodifications and equivalent arrangements included within the spirit andscope of the appended claims.

1. A method of making a coated article, the method comprising:depositing a release layer comprising zinc oxide on a glass substrate,wherein at least a layer comprising carbon is located between the glasssubstrate and the release layer comprising zinc oxide; ion beam treatingthe layer comprising zinc oxide with at least oxygen ions to provide anion beam treated layer comprising zinc oxide; depositing an oxygenbarrier layer on the glass substrate over the ion beam treated layercomprising zinc oxide; and wherein a protective film comprising the ionbeam treated layer comprising zinc oxide and the oxygen barrier layerare for protecting the layer comprising carbon during subsequent heattreatment in order to prevent significant burnoff of the layercomprising carbon.
 2. The method of claim 1, wherein said ion beamtreating comprises directing an ion beam including oxygen ions towardthe release layer comprising zinc oxide, wherein the ion beam issubstantially free of carbon ions.
 3. The method of claim 1, whereinsaid ion beam treating comprises directing an ion beam consistingessentially of oxygen ions toward the release layer comprising zincoxide.
 4. The method of claim 1, wherein the release layer consistsessentially of zinc oxide, which may optionally be doped with aluminumand/or nitrogen.
 5. The method of claim 1, wherein said ion beamtreating of the layer comprising zinc oxide causes a concentration ofOH-groups at an outer surface of the layer comprising zinc oxide to dropby at least 5%.
 6. The method of claim 1, wherein said ion beam treatingof the layer comprising zinc oxide causes a concentration of OH-groupsat an outer surface of the layer comprising zinc oxide to drop by atleast 10%.
 7. The method of claim 1, wherein the oxygen barrier layercomprises aluminum nitride.
 8. The method of claim 1, wherein the oxygenbarrier layer consists essentially of aluminum nitride.
 9. The method ofclaim 1, wherein the oxygen barrier layer directly contacts the ion beamtreated layer comprising zinc oxide.
 10. The method of claim 1, whereinthe layer comprising carbon comprises diamond-like carbon (DLC).
 11. Themethod of claim 1, further comprising heat treating the glass substratewith at least following layers thereon: the layer comprising carbon, theion beam treated layer comprising zinc oxide, and the oxygen barrierlayer; and wherein said heat treating comprises heating the glasssubstrate to temperature(s) sufficient for thermal tempering, heatstrengthening, and/or heat bending of the glass substrate.
 12. Themethod of claim 11, wherein the heat treating comprises heating theglass substrate at temperature(s) of at least 550 degrees C.
 13. Themethod of claim 1, further comprising exposing the protective film to arelease liquid and removing at least part of the protective film duringand/or after heat treatment.
 14. The method of claim 1, furthercomprising adhering first and second overlapping polymer based layers toan upper surface of the oxygen barrier layer.
 15. The method of claim 1,further comprising sputter-depositing a layer comprising silicon nitrideon the glass substrate, wherein the layer comprising silicon nitride islocated between the glass substrate and the layer comprising carbon. 16.The method of claim 1, wherein at least prior to heat treatment the ionbeam treated layer comprising zinc oxide is located between and directlycontacting the layer comprising carbon and the oxygen barrier layer. 17.The method of claim 1, wherein the layer comprising carbon comprisesamorphous DLC and has more sp^(a) carbon-carbon bonds than sp²carbon-carbon bonds.
 18. The method of claim 1, wherein the layercomprising carbon comprises hydrogenated DLC.
 19. The method of claim 1,wherein the coated article is substantially transparent at leastfollowing heat treating and removal of the protective film.
 20. Themethod of claim 1, wherein after removing the oxygen barrier layer andthe ion beam treated layer comprising zinc oxide, the layer comprisingcarbon is exposed so as to be an outermost layer of the coated article.21. A method of making a heat treated coated article, the methodcomprising: heat treating a coated glass substrate, the coated glasssubstrate comprising, prior to the heat treating, a glass substrate, alayer comprising diamond-like carbon (DLC) on the glass substrate, and aprotective film on the glass substrate over at least the layercomprising DLC, wherein the protective film includes (i) a release layercomprising zinc oxide which has been ion beam treated with at leastoxygen ions, and (ii) and an oxygen harrier layer, the release layer andthe oxygen barrier layer being of different material; during said heattreating of the coated glass substrate with the layer comprising DLC andthe protective film thereon, the protective film prevents significantburnoff of the layer comprising DLC, and wherein the heat treatingcomprises heating the glass substrate to temperature(s) sufficient forthermal tempering, heat strengthening, and/or heat bending; and exposingthe protective film to a release liquid and removing at least part ofthe protective film during and/or after said heat treating.
 22. Themethod of claim 21, wherein the oxygen barrier layer comprises aluminumnitride.
 23. The method of claim 21, wherein the oxygen barrier layerdirectly contacts the ion beam treated layer comprising zinc oxide. 24.The method of claim 21, further comprising adhering first and secondoverlapping polymer based layers to an upper surface of the oxygenbarrier layer.
 25. The method of claim 21, wherein the layer comprisingcarbon comprises amorphous DLC and has more sp³ carbon-carbon bonds thansp² carbon-carbon bonds.
 26. The method of claim 21, wherein the layercomprising DLC comprises hydrogenated DLC.
 27. The method of claim 1,wherein after removing the oxygen barrier layer and the ion beam treatedlayer comprising zinc oxide, the layer comprising DLC is exposed so asto be an outermost layer of the coated article.
 28. A coated articlecomprising: a glass substrate supporting a coating, the coatingcomprising moving away from the glass substrate: a layer comprisingdiamond-like carbon (DLC); a layer comprising zinc oxide, wherein aconcentration of OH-groups at a surface of the layer comprising zincoxide farthest from the glass substrate is no greater than about 40%;and a layer comprising aluminum nitride on the glass substrate over anddirectly contacting the layer comprising zinc oxide.
 29. The coatedarticle of claim 28, further comprising a layer comprising siliconnitride located between the glass substrate and the layer comprisingDLC.
 30. The coated article of claim 28, wherein the layer comprisingzinc oxide directly contacts the layer comprising DLC.
 31. The coatedarticle of claim 28, wherein the concentration of OH-groups at thesurface of the layer comprising zinc oxide is no greater than about 35%.32. The coated article of claim 28, wherein the layer comprising zincoxide is ion beam treated.